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This course provides information on Radio Frequency Microelectromechanical Systems (RF MEMS) devices. Classic RF MEMS devices are discussed along with reconfigurable RF systems, integrated antennas, mmWave antenna arrays, 3D Transmission lines and antennas. It also includes information on fabrication techniques and device simulation.
Overview of MEMS
•Overview of RF MEMS • History of MEMS • A few commercial examples • Miniaturization: law of scaling• MEMS vs. IC fabrication processes
Structural mechanics • Elasticity • Mechanical properties of silicon • Dynamic response • Beam theory
Sensors and Actuators
• Cantilevers • Doubly clamped beams • comb-drive actuators • Lumped modeling • Examples of MEMS Sensors and Actuators • Auction mechanism (electrostatic, thermal, piezo, magnetic) •Case studies • Inertial • Optical •RF • Acoustic • Power
MEMS Fabrication Techniques
Photolithography • Bulk micromachining • Isotropic etch • Anisotropic Etch • Surface micromachining • Deep reactive ion etching • Silicon on Insulator • Planarization • Multi-layer processing• LIGA • Wafer level bonding • Through silicon via
RF MEMS Simulation Tools
•Multiphysics modeling • RF simulation tools
•Workshops • Conferences • Journals • Books • Key papers
Classical RF MEMS Devices
Resonators • Silicon clock • RF Ohmic switches • Switched capacitor banks • Filters • Variable capacitors • Phase Shifters • Packaging • Challenges /Shortcomings • Phased arrays
Beyond Switches and Resonators
Reconfigurable RF systems • Antenna tuning • mmW antenna arrays • Passive/Active arrays • Optical antennas • Micro/nano bolometers • Integrated antennas • 3D Transmission lines and antennas